| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a highly accurate micro-fabrication method with high manufacturing efficiency by reducing laser power required in exposure and reducing constraint conditions such as flexibility in selection of a laser light source, linear speed of a substrate, that in selecting a material of an intermediate layer and in selecting of film thickness of the intermediate layer in the exposure. <P>SOLUTION: The micro-fabrication method includes steps of: forming a layer (A) consisting of incomplete oxide which is transition metal oxide and whose oxygen content is less than stoichiometric composition on the substrate; forming a layer (B) consisting of complete oxide which is the transition metal oxide and whose oxygen content is the stoichiometric composition on the layer (A) and radiating a laser beam from the side of the layer (B) to perform development processing and the layer (B) is formed to have optical film thickness for developing an anti-reflection effect in wavelength of the laser beam. <P>COPYRIGHT: (C)2008,JPO&INPIT |
