| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the collection rate of a chemical exhausted from a protective film removal system. <P>SOLUTION: The protective film removal system comprises a cup body formed with an opening larger than a substrate in the top face; substrate holder which is arranged inside the cup body and holds the substrate horizontal; removing liquid supply nozzle for supplying a protective film removing liquid which is a fluorine-based solvent onto the surface of the substrate held on the substrate holder; driving mechanism for turning the substrate holder on the vertical axis to shake off a chemical which is a mixed solution of the removing liquid supplied from the removing liquid supply nozzle, and a dissolution liquid of the protective film which has been dissolved by the removing liquid, from the substrate; guide member for forming a space which forms a drainage passage wherein the chemical circulates between the guide member and the inner peripheral face of the cup body; sealing means for sealing the drainage passage when the liquid on the substrate is not shaken off; and collection tank connected to the bottom of the cup body via a collection passage. <P>COPYRIGHT: (C)2008,JPO&INPIT |
