| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a gray scale mask and a manufacturing device therefor, by which an optical component with high accuracy can be manufactured while suppressing abnormality occurring in a mask glass upon manufacturing a gray scale mask from a mask glass by use of raster mirror scanning. <P>SOLUTION: The method for manufacturing the gray scale mask comprises dividing a mask glass having photosensitivity into predetermined regions S1, S2, unidirectionally scanning each divided region with laser light while changing the luminous energy to expose the mask glass and to produce a gray scale mask from the mask glass, wherein the method is characterized in that the position to start irradiation with laser light in a continuous succeeding divided region S2 is a position overlapping the rear end of the preceding divided region S1 exposed to the laser light. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
