| 摘要 |
PROBLEM TO BE SOLVED: To provide a wiring board which can prevent damage on a conductive layer, and to provide its manufacturing method and a display. SOLUTION: The method for manufacturing a wiring board comprises a first etching step of etching a lower layer 31 and an upper layer 32 through a resist pattern 33 such that the lower layer 31 containing Al and the upper layer 32 containing Mo are subjected to side etching, an ashing step of retreating the resist pattern 33 to expose the surface at the side edge portion of the upper layer 32 following to the first etching step, and a second etching step of performing etching through the retreated resist pattern 33 such that the upper layer 32 has a forward tapered cross-section following to the ashing step. COPYRIGHT: (C)2008,JPO&INPIT
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