| 摘要 |
The invention relates to a method and a device for optically scanning a sample. The basic structure of the device comprises at least one adjustment unit and at least one scanning device. The sample is displaced in relation to the scanning device by means of the adjustment unit impinged upon by a control system, or vice versa. According to the invention, adjustment values for the mechanical compensation of play are incorporated, filed in the control system and taken into consideration during adjustment.
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