| 摘要 |
<p>A pumping system for evacuating an enclosure comprises a pumping mechanism (30), a motor (32) for driving the pumping mechanism, and a controller (36) for controlling the motor. The controller sets a maximum value for a rotational frequency of the motor and a maximum value for a current in the motor, and, to optimise the performance of the pumping system, independently adjusts the maximum values during evacuation of the enclosure.</p> |
