发明名称 |
Polysilicon rod separating device, has controlling device controlling feeding device such that feeding device feeds polysilicon rod into separating tool and desired piece of polysilicon rod is separated from rod |
摘要 |
<p>The device has an optical measuring device determining defined parameters of a polysilicon rod in a contactless manner, and the determined parameter is compared with the preset parameters in a computing and controlling device. The controlling device controls a feeding device based on a value determined by the comparison, such that the feeding device feeds the polysilicon rod into a separating tool so that a desired piece of rod is separated from the rod by the separating tool. An independent claim is also included for a method for producing a defect-free piece of polysilicon rod from a polysilicon rod.</p> |
申请公布号 |
DE102006020821(A1) |
申请公布日期 |
2007.11.08 |
申请号 |
DE20061020821 |
申请日期 |
2006.05.04 |
申请人 |
WACKER CHEMIE AG |
发明人 |
LICHTENEGGER, BRUNO;SCHANTZ, MATTHAEUS |
分类号 |
B23Q15/24;B23D51/04;B28D5/04;H01L21/304 |
主分类号 |
B23Q15/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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