发明名称 |
ANALYSIS OF ELEMENTAL COMPOSITION AND THICKNESS IN MULTILAYERED MATERIALS |
摘要 |
A method and computer program software product for establishing an areal density of an elemental constituent of one layer of a stack of layers of material overlying a substrate. Incident penetrating radiation excites characteristic x-ray fluorescent radiation in multiple lines associated with each of one or more elements. Areal densities of successive layers are determined by self-consistent solution of equations relating the ratios of intensities of the characteristic fluorescence lines of successive elements. |
申请公布号 |
WO2007041639(B1) |
申请公布日期 |
2007.11.08 |
申请号 |
WO2006US38846 |
申请日期 |
2006.10.04 |
申请人 |
THERMO NITON ANALYZERS LLC;GRODZINS, LEE |
发明人 |
GRODZINS, LEE |
分类号 |
G01N23/223 |
主分类号 |
G01N23/223 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|