| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor test method which reduces the test time for the terminal characteristics of a semiconductor device and prevents a decrease in yield. SOLUTION: An optimum value of wait time is set in a semiconductor test apparatus to suit the characteristics of a first lot under test (st2), and it is used for all lots in common to reduce the time required for resetting. When a defective item is detected in a test using the optimum wait time, retesting is performed under relaxed conditions by using wait time having a sufficient margin (st11), thereby preventing a decrease in yield in tests for lots having different characteristics. COPYRIGHT: (C)2008,JPO&INPIT
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