发明名称 |
Method for densifying sol-gel films to form microlens structures |
摘要 |
A method for densifying sol-gel films to form microlens structures includes preparing a sol-gel precursor, having at least one solvent therein. The sol-gel precursor is spin coated onto a wafer to form a sol-gel film thereon. The wafer and sol-gel film are hot plate baked at a temperature less than 200° C. to remove at least some of the solvent. The baked, wafer and spin-coated sol-gel film are treated with an oxygen plasma treatment to remove any remaining solvent and to densify the sol-gel film. The spin coating, hot plate baking and treating steps may be repeated as required. A microlens is formed from the densified sol-gel film.
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申请公布号 |
US2007259127(A1) |
申请公布日期 |
2007.11.08 |
申请号 |
US20060416986 |
申请日期 |
2006.05.02 |
申请人 |
SHARP LABORATORIES OF AMERICA, INC. |
发明人 |
ONO YOSHI;ULRICH BRUCE D.;ZHUANG WEI-WEI;TWEET DOUGLAS J. |
分类号 |
B05D5/06;B05D3/02;B05D3/12;H05H1/00 |
主分类号 |
B05D5/06 |
代理机构 |
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