发明名称 AN IMPROVED NET TABLE
摘要 <p>A net table comprising a net base plate having an array of regions, each for receiving an integrated circuit unit (ICU); each of said regions in communication with a vacuum source; a location device having a plurality of apertures, said apertures having peripheral barrier elements, wherein the location device and net base plate are arranged such that each region corresponds to an aperture, and consequently the peripheral barrier elements and regions forming an array of recesses into which the integrated circuit units fit.</p>
申请公布号 WO2007126393(A2) 申请公布日期 2007.11.08
申请号 WO2007SG00122 申请日期 2007.04.30
申请人 ROKKO SYSTEMS PTE LTD;LIM, CHONG CHEN, GARY;BAEK, SEUNG HO;JUNG, JONG JAE;SHEN, XUE FANG 发明人 LIM, CHONG CHEN, GARY;BAEK, SEUNG HO;JUNG, JONG JAE;SHEN, XUE FANG
分类号 H01L21/683;B28D5/00;H01L21/673;H01L21/78 主分类号 H01L21/683
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