Plasma source, has metal block that is electrically connected with anode and by insulator opposite to housing, where block has coupling device for electrical connection with high frequency generator

摘要

The source has a housing (1) and a plasma tank that is arranged in the housing, where the tank surrounds a plasma chamber (2). A high frequency voltage supplying device (3) supplies a high frequency voltage to an anode (6). A process gas is ionized in the plasma chamber by an electrical gas discharge with the high frequency voltage. The device is designed as a metal block (4) having a coating electrically connected with the anode and by an insulator (5) opposite to the housing. The block has a coupling device (7) for an electrical connection with a high frequency generator.