摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stacked piezoelectric actuator element wherein, even when its size is reduced, it is possible to increase a number of stacked layers and obtain a large displacement and, even when a lead wire is joined, sufficient reliability can be ensured. <P>SOLUTION: An inactive portion 28 of the stacked piezoelectric actuator element 20 is provided with an internal electrode layer 30 constructed of a partial electrode layer. <P>COPYRIGHT: (C)2008,JPO&INPIT |