| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an SIL (solid immersion lens) facilitating an assembly manufacturing operation and improving yield. <P>SOLUTION: In the SIL 2 whose spherical part opposite to the objective side is made into hemispherical, an anti-reflection film 5 is formed at least in an incidence range of incident light of the hemispherical spherical part. Tolerance to a thickness error is comparatively large, the high numerical apertures is attained by constituting the SIL of KTaO<SB>3</SB>, diamond, etc. and the assembly manufacturing operation is facilitated. <P>COPYRIGHT: (C)2008,JPO&INPIT |
