| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus capable of stably and highly accurately ejecting a very small amount of a liquid material. SOLUTION: The apparatus 1 for ejecting a liquid material is equipped with a cylindrical container 3 for storing a liquid material 2. The cylindrical container 3 has a syringe 10 and a nozzle member 20 coaxially attached to the end part of the syringe 10. The apparatus 1 for ejecting liquid material is further equipped with a shaft member 30 passing through the cylindrical container 3, a driving device 40 for causing the shaft member 30 to reciprocate in the axial direction, and a sheath member 50 disposed in the cylindrical container 3 and surrounding the shaft member 30. The nozzle member 20 comprises a nozzle 22 and a valve seat 23. A valve constituting part 34 that constitutes a valve together with the valve seat 23 is coaxially formed on the end part of the shaft member 30. The sheath member 50 is fixed to the cylindrical container 3 so as not to move together with the shaft member 30 and separates at least a part of the outer circumferential face of the shaft member 30 from the liquid material 2. COPYRIGHT: (C)2008,JPO&INPIT
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