发明名称 Gas preheater for chemical vapor processing furnace
摘要 A gas preheater ( 10 ) that includes an exit plate ( 20 ) having first and second sides ( 22, 24 ) and a plurality of through holes ( 26 ) and at least one body ( 34 ) mounted adjacent the first side ( 22 ), the at least one body ( 34 ) having a first end ( 36 ) and a second end ( 38 ), the second end ( 38 ) located between the body first end ( 36 ) and the exit plate first side ( 22 ), at least one sidewall ( 40 ) connecting the first and second ends ( 36, 38 ), a body opening ( 42 ) in the first end ( 36 ) extending into the body ( 34 ) and defining a body inner wall ( 44 ), and a plurality of passages ( 46 ) extending between the at least one sidewall ( 40 ) and the body inner wall ( 44 ).
申请公布号 US2007256636(A1) 申请公布日期 2007.11.08
申请号 US20060417033 申请日期 2006.05.04
申请人 HONEYWELL INTERNATIONAL 发明人 MILLER BRIAN J.;ARICO ALAN A.;WAGHRAY AKSHAY;MENZIE TODD M.;CRESS JAMES J.
分类号 C23C16/00 主分类号 C23C16/00
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