| 摘要 |
PROBLEM TO BE SOLVED: To provide a lighting device for an excimer lamp high in reliability and security in the long term by employing an electric detection means with good durability to detect lighting failure caused by lamp cracking or the like while the excimer lamp is turned on. SOLUTION: In the lighting device, when successively igniting and lighting with a resonance voltage of an output inductance L of a lighting power supply 6 and a capacitance C1 or C2 between electrodes 7 and 8 of an excimer lamp 9, an ignition frequency is first outputted to an ignition period T1, and a lighting frequency is outputted to the following lighting period T2. Security of the device is achieved by switching to the ignition frequency for an optional time T4 for every optional time interval T3 during the period T2 in which the lighting frequency is outputted, by monitoring the voltage applied to the excimer lamp during the optional time T4 by a voltage comparator 10, and by automatically shutting down the AC power supply input of the lighting power supply 6 by a circuit 5 that turns on and off the AC power supply input when detecting a voltage that is greater than the preset lighting voltage. COPYRIGHT: (C)2008,JPO&INPIT |
