| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device equipped with a temperature monitor for safely and surely detecting the temperature of a semiconductor element by simple configuration, and for surely protecting the semiconductor element from overheating, and to provide a manufacturing method for easily manufacturing the semiconductor device. SOLUTION: A semiconductor device is configured by providing a temperature monitor element 2 for detecting the temperature of a semiconductor element 1 which generates heat when currents are applied. This manufacturing method carries out a process for forming a silicon layer 20 by depositing polysilicon for configuring the temperature monitor element 2 on the insulating film of the semiconductor element; a heat treatment process for recrystallizing the silicon layer 20 into a single crystal by locally carrying out heat treatment by laser annealing; and a process for forming pn junction by introducing impurity into the silicon layer 20 as a polycrystal, or the silicon layer 20 recrystallized into the single crystal. COPYRIGHT: (C)2008,JPO&INPIT
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