| 摘要 |
PROBLEM TO BE SOLVED: To provide a charge density measuring device capable of measuring the charge density of a surface, without touching a member to be measured. SOLUTION: The measuring device includes a measuring plate 10, a probe unit 30 for amplifying the quantity of electrostatic charge guided to the measuring plate 10, and a shield member 20 provided in such a way as to surround the periphery of the measuring plate 10. Since the charge density is measured by this device on the basis of the quantity of the electrostatic charge guided to the measuring plate 10, the charge density of the surface can be measured without touching the member to be measured. Moreover, only the surface charge on a part facing the measuring plate 10 among surface charges of the member to be measured can be measured precisely, since the shield member 20 is provided in the periphery of the measuring plate 10. COPYRIGHT: (C)2008,JPO&INPIT
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