| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique capable of supporting a measuring sensor from a plurality of directions, and capable of regulating an inclination (parallelism) of a measured face with respect to an optical axis. SOLUTION: In this three-dimensional shape measuring instrument, a case 105 for storing an optical path forming part 5 constituting a measuring sensor 40 is provided with the first holding mechanism 103 provided with X-axial pinholes 101a on respective faces 2 with a measuring optical path 5a therebetween and opposed in parallel to the measuring optical path, having a shape (U-shape)surrounding two opposed faces of the case and other face between the two faces, having a Y-axial pinhole 102a in a position corresponding to the central part of a direction surrounding the other face, and for supporting X-axial parallel pins 101 inserted into the X-axial pinholes to tiltably hold the case , and the second holding mechanism 104 for supporting a Y-axial parallel pin 102 inserted into the Y-axial pinhole from a direction orthogonal to an axial direction of the X-axial parallel pins, and having a holding member 104a for tiltably holding the first holding mechanism. COPYRIGHT: (C)2008,JPO&INPIT
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