| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor tester capable of shortening the adjustment time for timing calibration and improving the adjustment accuracy. SOLUTION: The semiconductor tester includes a driver DR1 generating a driver signal; a delay element 50 variably delaying output timing of the driver signal; a comparator CP1 having an input end connected to an output end of the driver DR1; a delay element 52 variably delaying input timing of a strobe signal; a reference strobe signal output circuit 40, having a reference driver DR0 outputting a reference driver signal having known rise timing or fall timing; an input/output terminal where the connection points of the driver DR1 and the comparator CP1 are connected to a DUT 200; and relays RA1, RB1, RC1 selectively connected to either a reference strobe signal output circuit 40 or a termination resistor 70 that terminates a signal path, ahead of the connection point and a voltage source 72. COPYRIGHT: (C)2008,JPO&INPIT
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