| 摘要 |
PROBLEM TO BE SOLVED: To provide a vapor deposition source in which the replacement of a vapor deposition material is facilitated, and whose service life is long. SOLUTION: In the vapor deposition source 3, on the face where a bar-shaped electrode 40 is brought into contact with a vapor deposition material 35, a male screw 41 and a female screw 42 are formed, respectively, and, in a state where the bar-shaped electrode 40 is fitted, the bar-shaped electrode 40 and the vapor deposition material 35 are screwed. Since the bar-shaped electrode 40 and the vapor deposition material 35 are tightly stuck to each other by being screwed, when the vapor deposition material 35 is deformed by the repetition of arc discharge, even if the vapor deposition material 35 is separated from a cap 36, the state of the tight stuck to the bar-shaped electrode 40 is retained, and thus the stop of the arc discharge does not occur. COPYRIGHT: (C)2008,JPO&INPIT
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