| 摘要 |
<p>[PROBLEMS] A two-axis actuator that is of low cost and small-sized, where undesired vibration modes are suppressed, and whose movable section is stably driven. [MEANS FOR SOLVING PROBLEMS] The two-axis actuator has a stationary section (11), the movable section (30), and bridge members (15) provided between the stationary section (11) and the movable section (30). Each bridge member (15) has deformation sections (15b) at its both ends. One end (15b1) of one of the deformation sections is fixed to the stationary section (11), and one end (15b2) of the other deformation section is fixed to the movable section (30). The distance between the ends (15b1) of the deformation sections (15b) fixed to the stationary section (11) is set smaller than the distance between the ends (15b2) of the deformation sections fixed to the movable section (30). The actuator has a drive mechanism that applies drive force to the movable section (30), in the direction of the two axes crossing each other.</p> |
