| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that, in optical components used in a short wavelength region of 300 nm or less, even in cases where almost no metallic impurities such as CeO<SB>2</SB>are detected and the surface roughness is less than 1ÅRMS, the transmittance may still be lower by 0.5% or more than a theoretical transmittance. <P>SOLUTION: To provide a method for manufacturing ultraviolet optical components that is characterized by that the optical components are subjected to a heat treatment at a temperature of 100 to 1000°C either before or after the surfaces of the optical components are subjected to an HF treatment. <P>COPYRIGHT: (C)2008,JPO&INPIT |
