| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a three-dimensional mold having high accuracy and high production efficiency and reducing the time for electron beam irradiation. <P>SOLUTION: The method for manufacturing a three-dimensional mold includes an irradiation step of irradiating a resist layer comprising an organopolysiloxane of an object to be processed having the resist layer on a substrate with electron beams and a developing step of developing the resist layer after irradiated with electron beams so as to form a concave-convex pattern on the resist layer, wherein the irradiation step includes a step of irradiating the resist with electron beams at an acceleration voltage that controls primary electron not to reach the substrate but secondary electron to reach the substrate. <P>COPYRIGHT: (C)2008,JPO&INPIT |
