发明名称 METHOD OF MANUFACTURING METAL WIRING AND METHOD OF MANUFACTURING DISPLAY BOARD USING THE SAME
摘要 PROBLEM TO BE SOLVED: To disclose a method of manufacturing a metal wiring and a method of manufacturing a display board for improving display quality. SOLUTION: The method includes: sequentially forming a channel layer and a metal layer on a base substrate; forming a photopattern in a wiring region; etching the metal layer by using the photopattern to form the metal wiring; removing the photopattern by only a fixed thickness to form the residual photopattern on the metal wiring; etching the channel layer in such a manner that an undercut is formed under the metal wiring by using the metal wiring; and removing the projected part of the metal wiring that is projected by the undercut by using the residual photopattern. Thereby, an improvement in aperture ratio, afterimage removal, and an improvement in image quality can be contrived. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007294946(A) 申请公布日期 2007.11.08
申请号 JP20070096858 申请日期 2007.04.02
申请人 SAMSUNG ELECTRONICS CO LTD 发明人 KIN SHOSHU;KIN SHOKO
分类号 H01L21/3213;G02F1/1368;G09F9/00;G09F9/30;H01L21/336;H01L29/786 主分类号 H01L21/3213
代理机构 代理人
主权项
地址