SEAL MEMBER, DEPRESSURIZED CHAMBER, DEPRESSURIZING PROCESSING APPARATUS, SEAL MECHANISM OF DEPRESSURIZED CHAMBER, AND METHOD OF MANUFACTURING A DEPRESSURIZED CHAMBER

摘要

A seal member internally seals a depressurized chamber constructed by joining a plurality of plates. The seal member includes a linear portion for sealing a linear joint of the depressurized chamber and a loop portion for sealing around a corner of the depressurized chamber by being pressed against internal walls of the plates forming the corner. The loop portion is arranged to enclose the corner of the depressurized chamber. The loop portion is fixed by using a support block held at the corner and a corner pressing member joined to the plates forming the corner. The loop portion is secured between a support surface of the support block and the corner pressing member.