| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a motor controller capable of suppressing the generation of a mechanical stress by driving a driving shaft with a balanced driving force corresponding to imbalance of a load, even if a motor is stopped when an abnormality occurs in the load in a state where the load has the imbalance for the driving shaft, and to provide a stage device with the same. <P>SOLUTION: The motor controller is provided which has a stopping control unit for control-stopping or urgently stopping the driving shaft of the load shaft as a second shaft for the driving shaft as a first shaft, on the basis of load information indicating unbalanced amount of a load to the driving shaft. <P>COPYRIGHT: (C)2008,JPO&INPIT |
