| 摘要 |
PROBLEM TO BE SOLVED: To provide pulse laser equipment which can produce a harmonic laser beam having a controlled pulse width. SOLUTION: The pulse laser equipment comprises an optical resonator; a laser medium arranged in the optical resonator; an apparatus for exciting the laser medium; a Q switch for switching a first state where the quality factor Q of the optical resonator is relatively high and a second state where the Q is relatively low; a wavelength conversion element arranged in the optical resonator while including a nonlinear optical crystal and generating a harmonic of a basic wave emitted from the laser medium under the first state; a thermoregulator for varying the temperature of the wavelength conversion element; and a controller for storing the correspondence between the temperature of the wavelength conversion element and the pulse width of a harmonic generated from the wavelength conversion element along with a target pulse width, and controlling the thermoregulator such that the temperature of the wavelength conversion element becomes a target temperature corresponding to a target pulse width obtained from the correspondence. COPYRIGHT: (C)2008,JPO&INPIT
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