摘要 |
PROBLEM TO BE SOLVED: To prevent the occurrence of warpage in a disk substrate to enhance the quality of the disk substrate. SOLUTION: This disk mold comprises a first support plate, a first mirror surface plate attached to the first plate, a second support plate and a second mirror surface plate attached to the second support plate and arranged in opposed relation to the first mirror surface plate. At least one of the first and second mirror surface plates is equipped with a first plate and the second plate arranged so as to surround at least the front of the first plate. A temperature conditioning flow channel is formed to the surface opposed to the first support plate of the first plate and a heat insulating part is formed to the surface opposed to the first plate of the second plate corresponding to the temperature conditioning flow channel. Since the heat insulating part is formed, a heat distribution is uniformized in the first and second plates. COPYRIGHT: (C)2008,JPO&INPIT
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