A THERMAL SENSOR WITH SPLIT-FLUIDIC CHANNEL AND PREPARATION METHOD THEREOF

摘要

A thermal sensor with a distribution fluid channel and a manufacturing method thereof are provided to remove a heater for controlling the temperature of a junction unit by forming the fluidic channel on a thermocouple. A thermal sensor with a distribution fluid channel includes a substrate(2), a first heat resistance layer(4), a thermocouple layer(6), a second heat resistance layer(8), and a distribution fluid channel layer(10). The first heat resistance layer is formed at one side of the upper side of the substrate. The thermocouple layer is formed at the upper side of the first heat resistance layer. The second heat resistance layer is formed at one side of the upper side of the first heat resistance layer and at one side of the upper side of the thermocouple layer to divide a high temperature junction unit(18) and a low temperature junction unit(16). The distribution fluid channel layer is formed at the upper side of the second heat resistance layer to form the external appearance of the distribution fluid channel.