MANUFACTURING PROCESS OF POLYIMIDE BASED MULTILAYER FILM, AND POLYIMIDE BASED MULTILAYER FILM OBTAINED BY THIS

摘要

PROBLEM TO BE SOLVED: To provide a techinique to enhance a peeling property of a multilayer gel film from the support and effectively avoid release between the multilayer gel film even in the case of preventing an unpinning failure in a film after a burn and of enhancing the peeling property of a multilayer film from the support using a chemical imide method when a polyimide based multilayer film is manufactured by a cast deposition method. SOLUTION: For example, when a multilayer liquid film 10 including a thermoplastic polyimide based varnish/heat-resistant polyimide based varnish/thermoplastic polyimide based varnish is formed on an endless belt to convert the film into a multilayer gel film 20, the technique comprises: integrating liquid films 11 and 13 of both outermost layers including the thermoplastic polyimide based varnish having the same composition as a broad liquid film whose width is broader than that of a liquid film 12 of a center layer including the heat-resistant polyimide based varnish; and making a single layer structure in which both the end parts of the multilayer liquid film 10 includes the only thermoplastic polyimide based varnish. COPYRIGHT: (C)2008,JPO&INPIT