PRESSURE SENSOR USING NEAR NET SHAPE SINTERED CERAMICS
摘要
A capacitive pressure sensor is formed with sensor body and diaphragm components made of near net shapeable sintered ceramic. In one configuration, the differential pressure sensor has two sintered ceramic cell halves with an internal sintered ceramic diaphragm captured between the two cell halves. In another configuration, two side-by-side sintered ceramic cell halves have individual sintered ceramic diaphragms, and the chambers of the two cell halves are connected by metal tubing.
申请公布号
WO2007127170(A2)
申请公布日期
2007.11.08
申请号
WO2007US09858
申请日期
2007.04.24
申请人
EMERSON PROCESS MANAGEMENT;SITTLER, FRED, C.;GANSEN, CARL, R.