| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for manufacturing an electro-optical device that can prevent a conductive film, provided on a substrate, from deforming and avoid reduction in the yield. SOLUTION: A heating part 36 which heats a surface 32a of a holding member 32 and a surface 35a of a metal film 35 is provided in the holding member 32, so that when a mother substrate G is held, the surfaces 32a and 35a can be heated in advance. When the mother substrate G is held at a high-temperature state, the heated surfaces 32a and 35a are made to abut against the mother substrate G, and this prevents the mother substrate from being cooled abruptly. COPYRIGHT: (C)2008,JPO&INPIT
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