| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical interferometer capable of enhancing measurement precision and capable of measuring a wide area. SOLUTION: The optical interferometer 100 includes a lighting optical system 110, a noninterference beam generation part 120 for multiplexing an object light with a reference light under a noninterference condition to form a noninterference beam, an interference fringe generation means 130 for generating an interference fringe by interference of the noninterference beam, and a CCD camera 140 for imaging the interference fringe. Polarization axes are orthogonal each other in the object light and the reference light, and the object light and the reference light pass the same route under the condition multiplexed as the noninterference beam. A Wollaston prism 131 and a polarization plate 132 are arranged as the interference fringe generation means 130, in a position in a just front side of a position where the noninterference beam gets incident into the imaging means. In the Wollaston prism 131, an advancing direction of the object light of noninterference beam is made different from an advancing direction of the reference light of noninterference beam to make incident angles of the object light and the reference light different when getting incident into the CCD camera 140. COPYRIGHT: (C)2008,JPO&INPIT
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