| 摘要 |
PROBLEM TO BE SOLVED: To provide a deformation measurement device for measuring the deformation from a variation in electric output capable of highly sensitively measuring minute deformation, further miniaturized so as to be able to detect a deformation in a small region. SOLUTION: The deformation measurement device comprises an insulation substrate, at least a pair of electrode arranged on the insulation substrate, the channel for connecting the electrode pair. The channel is including two or more conductor bodies separated so as to carry the tunnel current. COPYRIGHT: (C)2008,JPO&INPIT
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