<p>Disclosed are methods to synthesize new functional materials in an effective and efficient way. These methods include physical vapor deposition and laser-assisted epitaxial growth capable of synthesizing materials comprising a plurality of precursors with similar or dissimilar chemical and/or physical properties. The designated materials are formed during the combinatorial synthesis without the neccessity of post-deposition furnace heating to thermally activate simultaneous reaction and diffusion of precursor multilayers. Modulated photoreflectance spectroscopy may be used to screen regions of the library to assess deposition conditions.</p>
申请公布号
WO2007126725(A2)
申请公布日期
2007.11.08
申请号
WO2007US07358
申请日期
2007.03.23
申请人
INTEMATIX CORPORATION;XIANG, XIAO-DONG;WANG, GANG;SHAN, WEI;MELMAN, JONATHAN
发明人
XIANG, XIAO-DONG;WANG, GANG;SHAN, WEI;MELMAN, JONATHAN