| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a drawing preparation method for shortening time until drawing begins, or to provide a drawing device. <P>SOLUTION: The drawing method of the charged particle beam drawing device includes input steps (S102-S104 and S202-S204) for inputting substrate information of a substrate and drawing data in a predetermined pattern, and conveyance steps (S106-S110) for carrying the substrate into a vacuum chamber based on the mentioned substrate information whether or not the input of the drawing data has been made, in a drawing method of the charged particle beam drawing device for drawing the predetermined pattern on the substrate in the vacuum chamber using the charged particle beam drawing device equipped with the vacuum chamber. Owing to one aspect, time required until the drawing starts can be shortened. <P>COPYRIGHT: (C)2008,JPO&INPIT |
