发明名称 LIQUID DROPLET EJECTION HEAD, LIQUID DROPLET EJECTOR, MANUFACTURING METHOD FOR LIQUID DROPLET EJECTION HEAD AND MANUFACTURING METHOD FOR LIQUID DROPLET EJECTOR
摘要 PROBLEM TO BE SOLVED: To provide a liquid droplet ejection head in which first sealing of sealing the interior of a gap formed between an electrode glass substrate and a silicon cavity substrate is carried out simultaneously with anodic joining of the electrode glass substrate and the silicon cavity substrate each other, and to provide a liquid droplet ejector, a manufacturing method for the liquid droplet ejection head and a manufacturing method for the liquid droplet ejector. SOLUTION: The liquid droplet ejection head 100 comprises a cavity substrate 1, a glass substrate 2 in which an electrode part (discrete electrodes 8, a lead part 10 and a terminal part 11) is formed, and a nozzle substrate 3. A plurality of recesses 9 for forming the discrete electrodes 8 and the lead part 10, and a concave surface 26 for forming the terminal part 11 are formed in the glass substrate. A projecting part (first sealing part) formed of a sealant is prepared on the lead part 10 in the recess 9 of the concave surface 26 side. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007290272(A) 申请公布日期 2007.11.08
申请号 JP20060121776 申请日期 2006.04.26
申请人 SEIKO EPSON CORP 发明人 YAMAZAKI SEIJI
分类号 B41J2/045;B41J2/055;B41J2/16 主分类号 B41J2/045
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