| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inductively coupled plasma reactor in which transmission efficiency of induction coupling energy coupled with plasma is improved, in which plasma of high density can be maintained and obtained stably, and with which a multiplex magnetic core is coupled. <P>SOLUTION: This includes the reactor body having a plurality of plasma discharge rooms 21, a transformer 40 having the magnetic core 41 and a primary winding 42 installed across the plurality of plasma discharge rooms 21, a core protection tube 45 to cover the magnetic core 41 positioned inside the plasma discharge rooms 21, and a power source supplying source 60 coupled with the primary winding 42. A current of the primary winding 42 is driven by the power source supplying source 60, a driving current of the primary winding 42 induces an AC potential to form the inductively coupled plasma in order to complete a secondary circuit of the transformer 40, and the inductively coupled plasma is formed in the plurality of plasma discharge rooms 21 so as to cover the outside of a core protection tube 45. <P>COPYRIGHT: (C)2008,JPO&INPIT |
