| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic-wave function element and an acoustic-wave function element having a small propagation loss, being small-sized and having a high performance. SOLUTION: Reed screen-shaped electrode metallic thin-films 7 and 8 are attached on a piezoelectric substrate 1, and an ultra-low speed thin-film being composed of a grating structure and having a propagation speed of 1,000 m/s or less or a TeO<SB>2</SB>thin-film 9 is attached on the electrode metallic thin-films 7 and 8. Accordingly, the surface acoustic-wave function element having an extremely thin film thickness and a large reflection coefficient is obtained. A dispersion type function element having a structure attaching the ultra-low speed thin-film or the TeO<SB>2</SB>thin-film on the surface of the piezoelectric substrate or a piezoelectric thin-film substrate is acquired as a constitution. Alternately, a surface acoustic-wave substrate employing the thin-film as the grating structure and having the large reflection coefficient or the acoustic-wave function element using an acoustic-wave resonator combining the thin-film and a high-impedance thin-film is further obtained as the constitution. COPYRIGHT: (C)2008,JPO&INPIT
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