| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid discharge head substrate which suppresses a liquid swelling and highly-precise and highly-reliable channel inner surfaces and has discharge openings, a liquid discharge head using the substrate, and a manufacturing method thereof. SOLUTION: This invention is the liquid discharge head substrate having a substrate, an energy generation element formed on the substrate for discharging liquid, and a resin structure provided with a liquid discharge opening for discharging liquid and is provided so as to cover the energy generation element. At the part of the resin structure at which a surface forming the channel formed in the resin structure is in contact with the liquid, a protective layer formed by catalytic chemical vapor deposition can be provided. COPYRIGHT: (C)2008,JPO&INPIT
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