| 摘要 |
A correcting apparatus for wafer transport equipment is provided. The correcting apparatus includes a reflective component, an image capture module, an image processing module and a screen. The reflective component is disposed near a wafer carrying device to reflect an image of the wafer carrying device to the image capture module. The image capture module is disposed in the optical path of the reflected light of the reflective component to capture the image in the wafer carrying device. The image capture module is coupled to the image processing module. When a conveyer stretches into the wafer carrying device, the image processing module analyzes the image captured by the image capture module to determine whether the location of the conveyer is correct or not. The location of the conveyer is accurately and immediately adjusted according to the result of the analysis.
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