发明名称 |
HIGHLY RESPONSIVE MASTER-SLAVE VALVE POSITIONING |
摘要 |
<p>A master valve and at least one slave valve are connected via a network, wherein upon broadcast of a position setpoint of the master valve the at least one slave valve achieves a corresponding position within a shortened period of time, such network being a dedicated network or high speed shared network with position setpoint priority.</p> |
申请公布号 |
WO2007126543(A2) |
申请公布日期 |
2007.11.08 |
申请号 |
WO2007US05663 |
申请日期 |
2007.03.05 |
申请人 |
MKS INSTRUMENTS, INC. |
发明人 |
GOLDMAN, DAVID, J.;RYAN, MARTIN;DAVIDKOVICH, VLADISLAV;HILL, GORDON |
分类号 |
F16K31/12;A01G25/16 |
主分类号 |
F16K31/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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