发明名称 HIGHLY RESPONSIVE MASTER-SLAVE VALVE POSITIONING
摘要 <p>A master valve and at least one slave valve are connected via a network, wherein upon broadcast of a position setpoint of the master valve the at least one slave valve achieves a corresponding position within a shortened period of time, such network being a dedicated network or high speed shared network with position setpoint priority.</p>
申请公布号 WO2007126543(A2) 申请公布日期 2007.11.08
申请号 WO2007US05663 申请日期 2007.03.05
申请人 MKS INSTRUMENTS, INC. 发明人 GOLDMAN, DAVID, J.;RYAN, MARTIN;DAVIDKOVICH, VLADISLAV;HILL, GORDON
分类号 F16K31/12;A01G25/16 主分类号 F16K31/12
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