| 摘要 |
<p>A force sensor chip (1) having a multiaxial force sensing function is disclosed. The force sensor chip comprises a base member (2) having an operating part (4) provided with an external force application area (4A), a supporting part (3) for supporting the operating part, connecting parts (5A through 5D) for connecting the operating part and the supporting part, and strain resistance elements (Sxa1 through Sxa3, Sxb1 through Sxb3, Sya1 through Sya3, and Syb1 through Syb3) disposed in the connecting parts or within boundaries between the connecting parts and the operating part. The base member has a thin area (20) formed with a small thickness, and the boundaries of the thin area are disposed in the supporting part and operating part.</p> |
