发明名称 |
Diamond substrate and method for fabricating the same |
摘要 |
A diamond substrate and a method for fabricating the same are provided, wherein a protection layer is formed on one surface of a diamond layer in the process of forming the diamond layer by chemical vapor deposition process, for reducing the deformation of the diamond layer. Thereby the deformation of diamond substrate falls within the range of permitted tolerance of deformation, so that the performance of the diamond substrate is enhanced.
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申请公布号 |
EP1852896(A1) |
申请公布日期 |
2007.11.07 |
申请号 |
EP20060290727 |
申请日期 |
2006.05.05 |
申请人 |
KINIK COMPANY |
发明人 |
CHANG, HSIAO-KUO;HUANG, JEN-SHEUAN;TENG, CHIEN-CHUNG;CHUNG, CHIH-HSIEN;WANG, MING-HUI |
分类号 |
H01L21/20;C30B29/04 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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