发明名称 |
VAPOR DEPOSITION OF OXIDES, SILICATES, AND PHOSPHATES |
摘要 |
Metal silicates or phosphates are deposited on a heated substrate by the reaction of vapors of alkoxysilanols or alkylphosphates along with reactive metal amides, alkyls or alkoxides. For example, vapors of tris-(ter-butoxy)silanol react with vapors of tetrakis(ethylmethylamido)hafnium to deposit hafnium silicate on surfaces heated to 300 °C. The product film has a very uniform stoichiometry throughout the reactor. Similarly, vapors of diisopropylphosphate react with vapors of lithium bis(ethyldimethylsilyl) amide to deposit lithium phosphate films on substrates heated to 250 °C. supplying the vapors in alternating pulse produces these same compositions with a very uniform distribution of thickness and excellent step coverage. |
申请公布号 |
KR20070107813(A) |
申请公布日期 |
2007.11.07 |
申请号 |
KR20077024096 |
申请日期 |
2007.10.19 |
申请人 |
THE PRESIDENT AND FELLOWS OF HARVARD COLLEGE |
发明人 |
GORDON ROY G.;BECKER JILL;HAUSMANN DENNIS;SUH SEIGI |
分类号 |
C23C16/40;C23C16/42;C07F9/09;C07F9/11;C23C16/44;C23C16/455;H01L21/314;H01L21/316 |
主分类号 |
C23C16/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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