| 摘要 |
A substrate transfer apparatus and a substrate processing system using the same are provided to process a plurality of substrates with a process chamber by providing the substrate transfer apparatus loading and unloading substrates at the same time. A substrate transfer apparatus(800) comprises a drive unit(840), at least one spindle(830), a plurality of first rotational plate arms, and a plurality of rotational plate arm. The drive unit provides torque. The spindle is connected with the drive unit. The first rotational plate arms load and unload substrates into a first process chamber. The second rotational plate arms load and unload substrates into a second process chamber. The first and second rotational plate arms includes at least one rotational plate arm(820) for loading pre-processed substrates and at least one rotational plate arm(822) for unloading post-processed substrate.
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