| 摘要 |
<p>A rotary reticle transferring device is provided to inspect a pellicle accurately by stably reversing a reticle using an upper gripper whose length is the same as the length of a lower gripper. A rotary reticle transferring device includes a body frame(11), a lower gripper(13), a guide rail(15), and an upper gripper(12). The body frame forms a main body of the reticle delivery device. The lower gripper is rotatably coupled with one side surface of the body frame. The guide rail is formed to be normal to one side surface of the lower gripper. The upper gripper is arranged to be reciprocally moved in a vertical direction on the guide rail. Holding members are formed on an end portion of the upper and lower grippers, respectively.</p> |
