SELECTIVE PLASMA RE-OXIDATION PROCESS USING PULSED RF SOURCE POWER,申请号EP20060719894-传众专利搜索

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发明名称	SELECTIVE PLASMA RE-OXIDATION PROCESS USING PULSED RF SOURCE POWER
摘要
申请公布号	EP1851795(A2)	申请公布日期	2007.11.07
申请号	EP20060719894	申请日期	2006.01.30
申请人	APPLIED MATERIALS, INC.	发明人	CHUA, THAI CHENG
分类号	H01L21/8234;H01L21/31;H01L21/336	主分类号	H01L21/8234
代理机构		代理人
主权项
地址

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